Impact of sample storage type on adventitious carbon and native oxide growth: X-ray photoelectron spectroscopy study

نویسندگان

چکیده

The type and degree of contamination on surfaces intended for X-ray photoelectron spectroscopy (XPS) studies is considered decisive meaningful reliable analysis as in many cases in-situ cleaning methods are not applicable or otherwise undesired. We report the effects sample storage environment predominantly carbon- oxygen-containing species accumulating fourteen types thin film samples spanning group IVB-VIB transition metals (TMs), TM nitrides, diborides. All specimens were deposited by magnetron sputtering stored six months different common environments such openly a shelf office XPS lab, within polypropylene wafer carrier, polystyrene box, cellulose/polyester wipers sealed polyethylene bag. Self-consistent modelling C 1s, O B N metal core level spectra allowed to identify quantities surface contaminants, oxidation states, thicknesses native oxides, well address influence from ambient volume, direct contact other surfaces, material release containers. results reveal significant differences between various and, hence, provide guidance all sorts including even those that employ Ar+ ion etch prior analyses, also amount contaminants may impact outcome.

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ژورنال

عنوان ژورنال: Vacuum

سال: 2022

ISSN: ['0042-207X', '1879-2715']

DOI: https://doi.org/10.1016/j.vacuum.2022.111463